i-line Mask Aligner

Make/ Model:

Karl Suss MJB3

Instrument Description:

Easy to use and compact in size the SUSS MicroTec MJB3 represents the perfect system for laboratories and small volume production. As an inexpensive photolithography solution the MJB3 has set industry standards specifically for processing of small substrates and pieces up to 100mm. Equipped with a reliable, high precision alignment and high resolution printing capability in the submicron range the MJB3 demonstrates a performance unsurpassed by any comparable machine. 

Primary Contact :

Tzu-Min Ou   

email id:

Instrument Location:

Engineering Center, ECEE271