Marcel continuously pursues his dream of a thriving career in academia. He currently is an SRC Research Scholar and Professional Research Assistant at CU Boulder, USA, in the group of Steven M. George. There, he works on SRC project 3083.001: »Gas-Phase Methods for Selective Thermal Atomic Layer Etching of Si-Based Materials«. From 2019–2021, he successfully completed SRC project 2871.001: »Area-Selective Deposition of Organic Films using Molecular Layer Deposition and Molecular Layer Etching«.
In 2011, Marcel received his Dipl.-Ing. (equiv. to M.Sc.) degree from TUD in Dresden, Germany, which was assigned the GLOBALFOUNDRIES award 2011 for the year's best diploma thesis in the microelectronics degree program. After his M.Sc., he got a 6-month contract at NaMLab under Prof. Dr.-Ing. Thomas Mikolajick, before receiving a 3-year Ph.D. fellowship from the European Social Fund and Free State of Saxony of the Federal Republic of Germany. At the turn of 2012/13, he stayed for a quarter year as visiting researcher at the University of Nebraska–Lincoln, USA, in the ellipsometry group of Prof. Dr. habil. Mathias Schubert. From 2014 to 2018, he researched as a full-time Scientist on DFG project »Quantum-Mechanical Device Concepts Including Ultra-Thin Functional ALD Films for Employment in TeraHertz Applications« at TUD in the group of Prof. Dr. rer. nat. Johann W. Bartha.
In total, until now, Marcel's expertise in selective, Ångström-level processing; i.e., atomic layer etching, atomic layer deposition, molecular layer deposition, area-selective deposition and etch; as well as in-situ and in-vacuo metrology, is based on more than a decade of practical experience, including leading industry collaborations and contract research with Intel, TEL, IBM, ASM, Infineon, and GLOBALFOUNDRIES. He authored and co-authored more than 60 publications in peer-reviewed journals and at international conferences. He has been a student member of SPIE, DPG, AVS, AKE, and VDE.
Furthermore, Marcel holds the Saxonian Certificate of University Didactics from Saxony's Centre for Teaching and Learning. He mentored 2 seminars on the basics of electrical engineering, as well as supervised 8 master's theses and student research projects at TUD. He gave a 90-min invited lecture at the HERALD Summer School 2015 in Brescia, Italy; an invited talk at the Novel High-k Application Workshop 2016 (jointly with Dr. Jonas Sundqvist) in Dresden; as well as a 30-min invited tutorial at the EFDS Workshop 2017 in Dresden.
Publications with the research group
1. Marcel Junige and Steven M. George, “Area-Selective Molecular Layer Deposition of Nylon 6,2 Polyamide: Growth on Carbon and Inhibition on Silica”, J. Vac. Sci. Technol. A 39, 023204 (2021).