View from Bear Peak hike
Current affiliation: Seagate Technology

Jonas is a Ph.D. candidate in the Chemistry Department at the University of Colorado at Boulder. He is a member of the Steven George Group in the Chemistry Department and also has a co-advisor, Victor Bright, in the Mechanical Engineering Department. His research is focused on  Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) and their applications for MEMS devices. Jonas received his B.S. in Chemistry and Physics from Wisconsin Lutheran College in Milwaukee, WI in 2012. His undergraduate research focused on ozone for sensor and potable water applications. In his free time he enjoys snowboarding, biking, hiking, volleyball, and hanging out with his dog, Einstein.


  • Articles:

SF4 as the Fluorination Reactant for Al2O3 and VO2 Thermal Atomic Layer Etching

Jonas Gertsch · Austin Cano · Victor Bright  · Steven George

Submitted to Chemistry of Materials


Electrical and Thermal Conduction in Ultra-thin Freestanding Atomic Layer Deposited W Nanobridges

Nathan T Eigenfeld · Jonas C Gertsch · George D Skidmore · Steven M George · Victor M. Bright

Oct 2015 · Nanoscale


Hemispherical micro-resonators from atomic layer deposition

Jason M Gray · John P Houlton · Jonas C Gertsch · Joseph J Brown · Charles T Rogers · Steven M George · Victor M Bright

Dec 2014 · Journal of Micromechanics and Microengineering


GaN nanowire coated with atomic layer deposition of tungsten: A probe for near-field scanning microwave microscopy

Joel C Weber · Paul T Blanchard · Aric W Sanders · Jonas C Gertsch · Steven M George · Samuel Berweger · Atif Imtiaz · Kevin J Coakley · Thomas M Wallis · Kris A Bertness · Pavel Kabos · Norman A Sanford · Victor M Bright

Sep 2014 · Nanotechnology


  • Conference Papers:

First Transistor Demonstration of Thermal Atomic Layer Etching: InGaAs FinFETs with Sub-5nm Fin-Width Featuring In-Situ ALE-ALD

Wenjie Lu · Younghee Lee · Jessica Murdzek · Jonas Gertsch · Alon Vardi · Lisa Kong · Steven George · Jesus del Alamo

Dec 2018 · Contributed Paper: 2018 IEEE International Electron Devices Meeting (IEDM)


Thermal Atomic Layer Etching of VO2 Using Sequential Exposures of SF4 and Either Sn(acac)2 or BCl3

Jonas Gertsch · Victor Bright · Steven George

Oct 2017 · Contributed Oral: AVS 64th International Symposium & Exhibition


SF4 as a New Fluorine Reagent for Thermal ALE: Application to Al2O3 and VO2 ALE

Jonas Gertsch · Victor Bright · Steven George

July 2017 · Contributed Poster: ALD/ALE 2017- 17th International Conference on Atomic Layer Deposition


Design, fabrication, and characterization of a micromachined glass-blown spherical resonator with insitu integrated silicon electrodes and ALD tungsten interior coating

Joan Giner · Jason M. Gray · Jonas Gertsch · Victor M. Bright · Andrei M. Shkel

Feb 2015 · Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)


Effect of Film Stress on the Shape of Nanostructures Grown Using Atomic Layer Deposition

Jonas C Gertsch · Nathan Eigenfeld · Jason Gray · Joseph Brown · Victor Bright · Steven George

American Vacuum Society International Symposium· Nov 2014