Published: July 10, 2017 By


We at the University of Colorado are lucky enough to have the American Vacuum Society's ALD conference and ALE workshop hosted here in Colorado. The George group will have a strong presence this year with three posters and eight oral presentations by current group members (not to mention those given by group alums)! Here's the schedule of George group talks:

Saturday | Atomic Layer Etching Poster Session, 6 pm

Joel ClanceyIn Situ Mass Spectrometer Studies of Volatile Etch Products During Thermal Al2O3 Atomic Layer Etching Using HF and Trimethylaluminum

David ZywotkoThermal Atomic Layer Etching of ZnO by “Conversion-Etch” Using Hydrogen Fluoride and Trimethylaluminum

Jonas GertschSF4 as a New Fluorine Reagent for Thermal ALE: Application to Al2O3 and VO2 ALE



Steven M. George, 2:00 pm, Atomic Layer Etching Session I, Thermal Atomic Layer Etching of SiO2 by a “ConversionEtch” Mechanism 



Younghee Lee, 8:00 am, Atomic Layer Etching Session III, Selectivity in Thermal Atomic Layer Etching (INVITED)

Nicholas Johnson, 11:15 am, Atomic Layer Etching Session III, WO3 and W Thermal Atomic Layer Etching Using “Conversion-Fluorination” and “Oxidation-Conversion-Fluorination” Etching Mechanisms

Tommi Kääriäinen, 11:45 am, ALD Fundamentals: Emerging Applications, Improving Processability of Poorly Flowing Pharmaceutical Powders by Atomic Layer Deposition

Jaclyn Sprenger, 4:00 pm, ALD Fundamentals: Process Development, Boron Nitride Growth at Room Temperature Using Electron Enhanced Atomic Layer Deposition (EE-ALD)



Alexander Yersak, 9:00 am, ALD Applications: Batteries I, Comparing Temporal and Spatial Atomic Layer Deposition for Enhanced Performance of Li Ion Battery Electrodes

Andrew Cavanagh, 2:30 pm, ALD for Manufacturing, Growth Rates During Silicon Spatial ElectronEnhanced Atomic Layer Deposition: Role of Dangling Bond Lifetime

Jasmine Wallas, 2:45 pm, ALD Applications: Batteries II, Improving Interfacial Stability of Sulfide-Based LithiumIon-Conducting Solid Electrolytes with ALD


Find the full ALD2017 schedule here and look for us at the conference!