Published: July 18, 2016

Several group members will be attending the ALD2016 conference and ALE workshop in Dublin on July 24-27, 2016.  The group has a number of talks and posters.  Steve has an invited talk on our work on thermal ALE at the ALE workshop.  Andrew will be discussing our new work on electron-enhanced Si ALD in two talks - one during the Highlights section on Monday morning.  Daniel will be describing our new spatial MLD reactor for growing organic polymer films in his talk.  Younghee will be describing his work on selectivity in thermal ALE at his poster.  Presentation times and descriptions of the talks can be found here in the conference program. Look for us in Dublin!