Resource Scheduler & Rates
Characterization Rates
| System | Model | Rates ($/hr) | |||
|---|---|---|---|---|---|
| CU Boulder 2 | External Non-Profit | External Federal | External Industry | ||
| Atomic Force Microscopy | Nanosurf DriveAFM | $62.79 | $69.07 | $62.79 | $156.98 |
| Critical Point Dryer | Leica EM CPD300 | $31.40 | $34.54 | $31.40 | $78.50 |
| Field Emission Scanning Electron Microscope | Hitachi SU8600 | $80.50 | $88.55 | $80.50 | $201.25 |
| Focused Ion Beam | FEI Nova 600i Dual Beam | $95.70 | $105.27 | $95.70 | $239.25 |
| Low Energy Ion Scattering Spectroscopy | Iontof QTac100 High Sensitivity LEIS system | $57.30 | $63.03 | $57.30 | $143.25 |
| Sample preparation for LEIS | $13.40 | $14.74 | $13.40 | $33.50 | |
| Optical Microscope | Leica DM2700 Upright | $32.50 | $35.75 | $32.50 | $81.25 |
| Plasma Cleaner | PIE Scientific Tergeo-Plus | $35.00 | $38.50 | $35.00 | $87.50 |
| Small Angle X-Ray Scattering | Xenocs Xeuss Pro | $56.67 | $62.34 | $56.67 | $141.68 |
| Scanning Electron Microscope | SU3500 VP SEM | $62.50 | $68.75 | $62.50 | $156.25 |
| Tabletop Scanning Electron Microscope | Hitachi TM-4000 Plus II with EDS | $44.30 | $48.73 | $44.30 | $110.75 |
| Sputter Coater/Carbon Coater | Leica EM ACE600 | $50.30 | $55.33 | $50.30 | $125.75 |
| UV-VIS-NIR Spectrophotometer | Shimadzu UV3600i with MPC-603A | $43.50 | $47.85 | $43.50 | $108.75 |
| Stereomicroscope | Leica S9 Greenough | $5.90 | $6.49 | $5.90 | $14.75 |
| Stylus Profilometer | Bruker DektakXTA | $45.90 | $50.49 | $45.90 | $114.75 |
| Data Analysis Workstation | $7.00 | $7.70 | $7.00 | $17.50 | |
| X-ray Photoelectron Spectroscopy | Kratos Axis Supra XPS Surface Analysis System | $68.30 | $75.13 | $68.30 | $170.75 |
| X-ray Diffraction | Rigaku SmartLab 9kW | $55.55 | $61.11 | $55.55 | $138.88 |
| Training 1 | $35.50 | $39.05 | $35.50 | $88.75 | |
| Assistance 1 | $50.88 | $55.97 | $50.88 | $127.20 | |
Fabrication Rates
| System | Model | Rates ($/hr) | |||
|---|---|---|---|---|---|
| CU Boulder 2 | External Non-Profit | External Federal | External Industry | ||
| E-Beam/Sputter Deposition | Angstrom Engineering EvoVac | $54.00 | $59.40 | $54.00 | $135.00 |
| Thermal Evaporator | Angstrom Engineering EvoVac | $48.80 | $53.68 | $48.80 | $122.00 |
| Thin Film Thickness Measurement | Filmetrics F40-UV | $48.90 | $53.79 | $48.90 | $122.25 |
| E-Beam Lithography Data Prep | GenISys BEAMER | $28.00 | $30.80 | $28.00 | $70.00 |
| Spectroscopic Ellipsometer | J.A. Woollam M-2000 | - | - | - | - |
| Digital Microscope | Keyence VHX-7100 | - | - | - | - |
| Solvent/Developer Benches | Kinetics SS | $25.30 | $27.83 | $25.30 | $63.25 |
| Toxic/Corrosive Benches | Kinetics PVC | $25.30 | $27.83 | $25.30 | $63.25 |
| Stylus Profilometer | KLA Tencor P7 | - | - | - | - |
| Spin Coaters | Laurell WS-650MZ | $36.50 | $40.15 | $36.50 | $91.25 |
| O2 Plasma Asher | March Jupiter III | $37.00 | $40.70 | $37.00 | $92.50 |
| High-Resolution 3D Printer 3 | Nanoscribe Photonic Professional GT2 | $48.60 | $53.46 | $48.60 | $121.50 |
| Mask Aligner | OAI 806 | - | - | - | - |
| Chlorine ICP Etcher | Plasma-Therm Apex | $66.20 | $72.82 | $66.20 | $165.50 |
| Fluorine RIE | Plasma-Therm Vision 320 | $48.50 | $53.35 | $48.50 | $121.25 |
| E-Beam Lithography | Raith EBPG 5150 Plus | $135.60 | $149.16 | $135.60 | $339.00 |
| Direct Writer | Raith Picomaster XF200 | - | - | - | - |
| Optical Profilometer/Confocal Microscope | Sensofar S neox | - | - | - | - |
| COSINC Fab Induction | $45.70 | $50.27 | $45.70 | $114.25 | |
| Training 1 | $28.65 | $31.52 | $28.65 | $71.63 | |
| Assistance 1 | $52.00 | $57.20 | $52.00 | $130.00 | |