Steven George
Chemical and Biological Engineering • Chemistry and Biochemistry


MSE Areas: Thin films, surface chemistry, nanoscale engineering, atomic layer deposition, molecular layer deposition, hybrid organic-inorganic materials, Li ion batteries, supercapacitors, fuel cells, protective coatings and barriers, transparent conducting films

Prof. George’s research interests are in the areas of surface chemistry, thin film growth and nanostructure engineering. He is currently directing an internationally recognized research effort focusing on atomic layer deposition (ALD) and molecular layer deposition (MLD). This research is examining new surface chemistry, measuring thin film growth rates, characterizing the properties of films and developing new applications for ALD and MLD. Current applications are using ALD & MLD to: enhance the performance of Li ion batteries; deposit the active electrode material for Li ion batteries and supercapacitors; fabricate flexible gas diffusion ultrabarriers; and deposit ultrathin and continuous Pt films as a catalyst for PEM fuel cells. Other projects are developing new ALD and MLD processes especially in the area of hybrid organic-inorganic materials and developing new reactors for spatial roll-to-roll ALD.

Selected Publications and Accomplishments

S.M. George, “Atomic Layer Deposition: An Overview”, Chem. Rev. 110, 111-131 (2010).

S.M. George, B. Yoon and A.A. Dameron, “Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic-Inorganic Polymers”, Acc. Chem. Res. 42, 498-508 (2009).

Byoung H. Lee, Byunghoon Yoon, Virginia R. Anderson and Steven M. George, “Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition”, J. Phys. Chem. C 116, 3250-3257 (2012).