Microsystems research involves micro- and nano-electromechanical systems (MEMS and NEMS) for transducers, sensors and actuators. Strengths include atomic, nano, micro fabrication technologies and advanced packaging. Visible, active programs are also underway in nano and microscale characterization, simulation and design of materials.

Course Guidance

In addition to MS Thesis requirements, no specific course is required for this research area. The courses below are intended to provide guidance on typical course options for students interested in Microsystems. 

Strongly Recommended

  • MCEN 5636 MEMS I
  • MCEN 5010 Microsystems Integration

Recommend

  • MCEN 5023 Solid Mechanics
  • MCEN 5024 Materials Chemistry & Structure
  • MCEN 5021 Fluid Dynamics
  • MCEN 5042 Heat Transfer

Specialized Courses/Electives

  • MCEN 5021 Fluid Dynamics
  • MCEN 5023 Solid Mechanics
  • MCEN 5024 Materials Chemistry & Structure
  • MCEN 5042 Heat Transfer
  • MCEN 5115 Mechatronics & Robotics
  • MCEN 5173 Finite Element Analysis
  • MCEN 5183 Mechanics of Composites
  • MCEN 5228 Mechanical Failure of Materials
  • MCEN 5228 Bio/Micro/Nano
  • MCEN 5228 Nanoscience
  • MCEN 5228 Microscale Heat Transfer
  • ASEN 5022 Dynamics of Aerospace Structures
  • ASEN 5519 Modeling and Simulation of Microfluidic Systems
  • ASEN 5519 Design Optimization
  • ECEN 5324 Microsystem Packaging
  • ECEN 5375 Microstructures Laboratory