Lecture Notes and Handouts
Opening lecture (January 18,
2012)
PolyMUMPs and Lab 1: Pop-up mirror (January 23, 2012)
Foundry and packaging;
literature review #1 on CMOS-MEMS (January 25, 2012)
RF MEMS and Lab 2: Zipper
Drive (January 30, 2012)
Literature review #1
on CMOS-MEMS; Literature review #2 RF MEMS and PCB MEMS (February 1, 2012)
Lab 3: Micro-mirror
and meshing technique (February 6, 2012)