Faculty: Bright, Daily, Dunn, S-H Lee, Y. C. Lee, Park, Peterson, Qi, Raj, Stoldt, Yang
Micro/Nanoscale Engineering research involves micro- and nano-electromechanical systems (MEMS and NEMS) for transducers, sensors, and actuators. Many activities are undertaken in the context of our DARPA Focus Center on Nanoscale Science and Technology for Integrated Micro/Nano-Electromechanical Transducers (iMINT). Atomic, nano, and micro fabrication technologies and advanced packaging are strengths. Visible, active programs are also underway in nano and microscale characterization, simulation, and design of materials.
Recent projects include:
- MEMS/NEMS chip-scale atomic clocks.
- Carbon nanotube technology for microsystems.
- Micro heat pipe technology.
- Nanoscale and ultrafast thermal sciences; thermoelectric devices and materials.
- High-temperature materials for energy applications.
- Electrochemical phenomena in microsysytems.
- Microfluidics for manipulation of chemical and biological species.
- Atomistic and molecular modeling of structure, transport, and mechanical behavior.
- Multifunctional energy harvesting and storage material design.
- Atomic layer thin-film deposition for MEMS/NEMS.