Uncooled Bolometers Using Atomic and Molecular Layer Deposition
PIs: Victor M. Bright
Student: Nathan Eigenfeld
Project field/specialty: Thermal sensors
Project Description:
Highly sensitive, broadband and robust IR imagers with low noise and fast response times are required to compete with existing devices. This project addresses these requirements via the use of atomic and molecular layer deposition. These processes allow for low thermal mass and thermally isolated pixel membranes.
Example of single microbolometer pixel. This suspended membrane is made up of two thin metal layers; an absorber and thermistor.
Yoneoka, M. Liger, G. Yama, R. Schuster, F. Purkl, J. Provine, F. B. Prinz, R. T. Howe, and T. W. Kenny, “ALD-Metal Uncooled Bolometer,” Proceedings of IEEE MEMS 2011 (Cancun, Mexico, January 23-27, 2011), pp. 676-679.
Example of integrated IR system. Infrared radiation is optically focused on the focal plane array (FPA) of microbolometer pixels. The relative pixel intensities are readout electronically via the change in resistance of each membrane by absorption heating.
Niklaus, F., Vieider, C., & Jakobsen, H. (2007). MEMS-based uncooled infrared bolometer arrays: a review. Proceedings of SPIE, 6836, 68360D-68360D-15. Spie. doi:10.1117/12.755128.
Funding Source: DARPA
